JPS6089538U - クリ−ンル−ムの防塵装置 - Google Patents

クリ−ンル−ムの防塵装置

Info

Publication number
JPS6089538U
JPS6089538U JP18319183U JP18319183U JPS6089538U JP S6089538 U JPS6089538 U JP S6089538U JP 18319183 U JP18319183 U JP 18319183U JP 18319183 U JP18319183 U JP 18319183U JP S6089538 U JPS6089538 U JP S6089538U
Authority
JP
Japan
Prior art keywords
clean room
dust prevention
prevention equipment
room dust
equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18319183U
Other languages
English (en)
Japanese (ja)
Other versions
JPS642109Y2 (en]
Inventor
井崎　祐一
宏司 大野
刀禰　憲久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kajima Corp
Original Assignee
Kajima Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kajima Corp filed Critical Kajima Corp
Priority to JP18319183U priority Critical patent/JPS6089538U/ja
Publication of JPS6089538U publication Critical patent/JPS6089538U/ja
Application granted granted Critical
Publication of JPS642109Y2 publication Critical patent/JPS642109Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP18319183U 1983-11-28 1983-11-28 クリ−ンル−ムの防塵装置 Granted JPS6089538U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18319183U JPS6089538U (ja) 1983-11-28 1983-11-28 クリ−ンル−ムの防塵装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18319183U JPS6089538U (ja) 1983-11-28 1983-11-28 クリ−ンル−ムの防塵装置

Publications (2)

Publication Number Publication Date
JPS6089538U true JPS6089538U (ja) 1985-06-19
JPS642109Y2 JPS642109Y2 (en]) 1989-01-18

Family

ID=30396533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18319183U Granted JPS6089538U (ja) 1983-11-28 1983-11-28 クリ−ンル−ムの防塵装置

Country Status (1)

Country Link
JP (1) JPS6089538U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60129539A (ja) * 1983-12-16 1985-07-10 Hitachi Ltd 空気清浄装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60129539A (ja) * 1983-12-16 1985-07-10 Hitachi Ltd 空気清浄装置

Also Published As

Publication number Publication date
JPS642109Y2 (en]) 1989-01-18

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